ListarArtículo en revista de investigación por tema "chemical properties"
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Influence of post‑deposition annealing on the chemical states of crystalline tantalum pentoxide films
(2018-11-01)We investigate the effect of post-deposition annealing (for temperatures from 848 K to 1273 K) on the chemical properties of crystalline Ta2O5 films grown on Si(100) substrates by radio frequency magnetron sputtering. The ...