Listar Artículo en revista de investigación por autor "McFeely, Caitlin"
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Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach
Mani Gonzalez, Pierre Giovanni; Snelgrove, Matthew; McFeely, Caitlin; Lahtonen, K; Lundy, Ross; Hughes, Greg; Valden, M; McGlynn, Enda; Yadav, Pravind; Saari, J; Morris, Mike A; O Connor, Robert (2020-03-06)Area selective deposition (ASD) is an emerging method for the patterning of electronic devices as it can significantly reduce processing steps in the industry. A potential ASD methodology uses infiltration of metal precursors ... -
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration
Mani Gonzalez, Pierre Giovanni; Snelgrove, Matthew; McFeely, Caitlin; Hughes, Gregory; Weiland, C; Woicik, Joshep; Shiel, Kyle; Ornelas, Carlos; Solis-Canto, Óscar; Cherkaoui, K; Hurley, P; Yadav, Pravind; Morris, Michael; McGlynn, Enda; O'Connor, Rob (2022-09-28)The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma ... -
Precise Definition of a “Monolayer Point” in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration
Mani Gonzalez, Pierre Giovanni; Lundy, Ross; Yadav, Pravind; Prochukhan, Nadezda; C Giraud, Elsa; F O’Mahony, Tom; Selkirk, Andrew; Mullen, Eleanor; Conway, Jim; Turner, Miles; Daniels, Stephen; Snelgrove, Matthew; Bogan, Justin; McFeely, Caitlin; O’Connor, Robert; McGlynn, Enda; Hughes, Greg; Cummins, Cian; A Morris, Michael (2020-10-06)In this work, we show that in order to fabricate coherent titania (TiO2) films with precise thickness control, it is critical to generate a complete polymer brush monolayer. To date, demonstrations of such dense polymer ... -
Titanium infiltration into ultrathin PMMA brushes
Mani Gonzalez, Pierre Giovanni (2021-07-21)Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area ...