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WO3-x THIN FILMS WITH Al, Pt Au AND Mo DOPING: SEARCHING FOR PIEZOELECTRICITY
(Sociedad Mexicana de Materiales, 2022-08-15)The present work focuses on the fabrication of WO3 thin films doped with Al, Pt, Au and Mo with a thickness in a range of 150 nm – 250 nm. The films were deposited by radio-frequency sputtering at 225 W of RF power commercial ...