Listar Publicaciones por autor "Morris, Michael"
Mostrando ítems 1-4 de 4
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Analysis of Al and Cu salt infiltration into a poly 2-vinylpyridine (P2vP) polymer layer for area selective deposition applications
Mani Gonzalez, Pierre Giovanni (2020-01)This work is motivated by the desire to develop a semiconductor device patterning technology based on precursor infiltration into block copolymer materials. Developing an understanding of the preferential infiltration of ... -
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration
Mani Gonzalez, Pierre Giovanni; Snelgrove, Matthew; McFeely, Caitlin; Hughes, Gregory; Weiland, C; Woicik, Joshep; Shiel, Kyle; Ornelas, Carlos; Solis-Canto, Óscar; Cherkaoui, K; Hurley, P; Yadav, Pravind; Morris, Michael; McGlynn, Enda; O'Connor, Rob (2022-09-28)The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma ... -
Hard x-ray photoelectron spectroscopy study of copper formation by metal salt inclusion in a polymer film
Snelgrove, Matthew (2019-08-08)In this work we present the results of a hard x-ray photoelectron spectroscopy (HAXPES) study on the creation of metallic copper layers via metal-salt infiltration into a poly-2-vinylpyridine (P2VP) film. Metal salt inclusion ... -
Surface characterization of poly-2-vinylpyridine—A polymer for area selective deposition techniques
Snelgrove, Matthew (2019-09-02)Thin films of OH terminated poly-2-vinylpyridine (P2VP), a polymer with potential for infiltration mediated thin film deposition, area selective deposition (ASD), and small feature size development via block copolymer (BCP) ...