Listar IIT por autor "Shiel, Kyle"
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Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration
Mani Gonzalez, Pierre Giovanni; Snelgrove, Matthew; McFeely, Caitlin; Hughes, Gregory; Weiland, C; Woicik, Joshep; Shiel, Kyle; Ornelas, Carlos; Solis-Canto, Óscar; Cherkaoui, K; Hurley, P; Yadav, Pravind; Morris, Michael; McGlynn, Enda; O'Connor, Rob (2022-09-28)The growth chemistry and electrical performance of 5 nm alumina films, fabricated via the area-selective vapor phase infiltration (VPI) of trimethylaluminum into poly(2-vinylpyridine), are compared to a conventional plasma ... -
Titanium infiltration into ultrathin PMMA brushes
Mani Gonzalez, Pierre Giovanni (2021-07-21)Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area ...