Listar por tema "MEMS, FLOW SENSOR"
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On the development and characterization of a MOEMS based bidirectional flowmeter
(Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C., 2018)In this work we provide: a) detail description of the MEMS sensing element device including its design parameters, FEA analysis, b) fabrications steps, c) integration into a 3D printed prototyping package and a collecting ...